Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379672 | Metrology of nanosheet surface roughness and profile | HaoMiao Chang, Teng Gu, Tianrong Zhan, Andrew Lagodzinski, Zhengquan Tan | 2025-08-05 |
| 12380367 | Metrology in the presence of CMOS under array (CuA) structures utilizing machine learning and physical modeling | Zhaxylyk Kudyshev, Chao Chang, Derrick Shaughnessy | 2025-08-05 |
| 12372882 | Metrology in the presence of CMOS under array (CUA) structures utilizing an effective medium model with classification of CUA structures | Zhaxylyk Kudyshev, Chao Chang, Derrick Shaughnessy | 2025-07-29 |