Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227842 | Vapor accumulator for corrosive gases with purging | Panya Wongsenakhum, Joshua Collins, Harald te Nijenhuis | 2025-02-18 |
| 12215420 | Pedestal thermal profile tuning using multiple heated zones and thermal voids | Alok Mahadeva | 2025-02-04 |
| D1057675 | Pedestal for a substrate processing system | Andrew Paul Eib | 2025-01-14 |