Alok Mahadeva

Lam Research: 1 patents #163 of 468Top 35%

Overall (2025): #459,844 of 469,880Top 100%

Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
12215420	Pedestal thermal profile tuning using multiple heated zones and thermal voids	Gary Lind	2025-02-04