Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371781 | In situ protective coating of chamber components for semiconductor processing | Akhil Singhal, Karl Leeser | 2025-07-29 |
| 12248252 | Bubble defect reduction | Akhil Singhal, Bart J. van Schravendijk, Girish Dixit, Siva Kanakasabapathy | 2025-03-11 |