Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392427 | Insulated fluid lines in chemical mechanical polishing | Hari Soundararajan, Paul D. Butterfield, Shou-Sung Chang, Haosheng Wu, Calvin Spencer Lee +1 more | 2025-08-19 |
| 12290897 | Fluid-tight electrical connection techniques for semiconductor processing | Shou-Sung Chang, Haosheng Wu | 2025-05-06 |