Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372988 | Method of controlling mixed liquid to be delivered for SPM solution | Yuan Jiang, Dawei Liu, Jing Zhang, Zhengkai Lu, Ming Xu +2 more | 2025-07-29 |
| 12334368 | Liquid delivering system for wafer cleaning equipment | Yilin Shen, Xinlai Chen, Dawei Liu, Jie Wang, Zhengkai Lu +3 more | 2025-06-17 |