Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334368 | Liquid delivering system for wafer cleaning equipment | Yilin Shen, Dawei Liu, Jie Wang, Zhengkai Lu, Ming Xu +3 more | 2025-06-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334368 | Liquid delivering system for wafer cleaning equipment | Yilin Shen, Dawei Liu, Jie Wang, Zhengkai Lu, Ming Xu +3 more | 2025-06-17 |