Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12259660 | Inspection method and inspection platform for lithography | Cheng-Hsien Chen, Shu-Chun Liao, Shau-Wei Hsu, Tsung-Ying Chung, Yi-Chen Chuang | 2025-03-25 |
| 12188883 | X-ray reflectometry apparatus and method thereof for measuring three dimensional nanostructures on flat substrate | Bo He, Chun-Ting Liu, Wen-Li Wu | 2025-01-07 |