Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12413832 | Substrate inspection apparatus, substrate inspection method, and recording medium | Daisuke Kajiwara, Hiroshi Tomita | 2025-09-09 |
| 12314023 | Treatment condition setting method, storage medium, and substrate treatment system | Takuya Mori, Akiko Kiyotomi, Hiroshi Tomita | 2025-05-27 |
| 12243213 | Substrate inspection device, substrate inspection system, and substrate inspection method | Shuji Iwanaga | 2025-03-04 |