Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272558 | Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification | Matthew Flaugh, Subhadeep Kal, Pingshan Luan, Hamed Hajibabaeinajafabadi, Yu-Hao Tsai +1 more | 2025-04-08 |