Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411426 | Substrate holding board, manufacturing method of device, and exposure device | Shinji Fukui, Toshinao Tatsuno, Hideo Akiba | 2025-09-09 |
| 12400906 | Wafer chuck, method for producing the same, and exposure apparatus | — | 2025-08-26 |