Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411426 | Substrate holding board, manufacturing method of device, and exposure device | Shinji Fukui, Toshinao Tatsuno, Keiji Hirabayashi | 2025-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411426 | Substrate holding board, manufacturing method of device, and exposure device | Shinji Fukui, Toshinao Tatsuno, Keiji Hirabayashi | 2025-09-09 |