Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346030 | Device and method for regulating and controlling incident angle of light beam in laser interference lithography | Leijie Wang, Yu Zhu, Ming Zhang, Rong Cheng, Xin Li +1 more | 2025-07-01 |