Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12369244 | Laser system for source material conditioning in an EUV light source | Igor V. Fomenkov, Robert Jay Rafac | 2025-07-22 |
| 12245350 | Optical isolation module | Daniel John William Brown, Alexander Anthony Schafgans, Palash P. Das | 2025-03-04 |