Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12369244 | Laser system for source material conditioning in an EUV light source | Igor V. Fomenkov, Yezheng Tao | 2025-07-22 |
| 12238848 | EUV light source target metrology | — | 2025-02-25 |