Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405542 | Method of determining a mark measurement sequence, stage apparatus and lithographic apparatus | Istvan Nagy, Özer Duman, Arjan Gijsbertsen, Pieter Jacob Heres, Rudolf Michiel Hermans +3 more | 2025-09-02 |