Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405542 | Method of determining a mark measurement sequence, stage apparatus and lithographic apparatus | Istvan Nagy, Özer Duman, Pieter Jacob Heres, Rudolf Michiel Hermans, Erik W. L. Jansen +3 more | 2025-09-02 |
| 12399436 | Substrate holder, carrier system comprising a substrate holder and lithographic apparatus | Krijn Frederik Bustraan, Paul Van Dongen, Ibrahim Acan | 2025-08-26 |
| 12253807 | Height measurement method and height measurement system | Andrey Valerievich ROGACHEVSKIY, Bastiaan Andreas Wilhelmus Hubertus Knarren, Doru Cristian Torumba, Cristina CARESIO, Raymund CENTENO +2 more | 2025-03-18 |