Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339583 | Optimization using a non-uniform illumination intensity profile | Janardan Nath, Christopher Mason, Todd R. Downey, Tian Gang | 2025-06-24 |
| 12222656 | Method for determining aberration sensitivity of patterns | Jingjing Liu, Xingyue PENG | 2025-02-11 |
| 12210291 | Aberration impact systems, models, and manufacturing processes | Xingyue PENG, Zhan Shi, Rafael C. Howell, Gerui LIU | 2025-01-28 |