Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365981 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Tiina McKee, Timo Hatanpää, Mikko Ritala | 2025-07-22 |
| 12365988 | Atomic layer deposition and etching of transition metal dichalcogenide thin films | Jani Hamalainen, Mikko Ritala | 2025-07-22 |
| 12230506 | Area selective organic material removal | Mikko Ritala, Chao Zhang | 2025-02-18 |
| 12209305 | Deposition of transition metal—comprising material | Miika Mattinen, Timo Hatanpää, Mikko Ritala | 2025-01-28 |