Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365988 | Atomic layer deposition and etching of transition metal dichalcogenide thin films | Mikko Ritala, Markku Leskelä | 2025-07-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365988 | Atomic layer deposition and etching of transition metal dichalcogenide thin films | Mikko Ritala, Markku Leskelä | 2025-07-22 |