Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411424 | Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object | Remco VAN DE MEERENDONK, Daniel Jozef Maria Direcks, Günes NAKIBOGLU, Nicholas Peter Waterson, Joost André KLUGKIST +6 more | 2025-09-09 |