Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334367 | Method and apparatus for removing particles or photoresist on substrates | Xiaoyan Zhang, Wenjun Wang, Fuping Chen, Jun Wang, Shena Jia +3 more | 2025-06-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334367 | Method and apparatus for removing particles or photoresist on substrates | Xiaoyan Zhang, Wenjun Wang, Fuping Chen, Jun Wang, Shena Jia +3 more | 2025-06-17 |