Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334367 | Method and apparatus for removing particles or photoresist on substrates | Xiaoyan Zhang, Wenjun Wang, Fuping Chen, Jun Wang, Deyun Wang +3 more | 2025-06-17 |
| 12186684 | Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device | Fuping Chen, Hui Wang, Xi Wang, Danying Wang, Chaowei Jiang +2 more | 2025-01-07 |