Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094731 | Substrate drying apparatus | Hirotaka Ohashi, Fumiya Okazaki | 2024-09-17 |
| 12027402 | Substrate processing apparatus and substrate processing method | Toshio Yokoyama, Tomonori Hirao, Hirotaka Ohashi | 2024-07-02 |