Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027402 | Substrate processing apparatus and substrate processing method | Tomonori Hirao, Takuya Tsushima, Hirotaka Ohashi | 2024-07-02 |
| 12020954 | Substrate processing apparatus | Hirotaka Ohashi, Mizuki Nagai, Ryu Miyamoto | 2024-06-25 |