Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12185055 | Multi-cavity packaging for microelectromechanical system microphones | Guofeng Chen, Rakesh Kumar, Michael Jon Wurtz, Humberto Campanella-Pineda | 2024-12-31 |
| 12101601 | Piezoelectric microelectromechanical system microphone with optimized output capacitance | Guofeng Chen, Rakesh Kumar, Michael Jon Wurtz, Humberto Campanella-Pineda | 2024-09-24 |
| 12037239 | Method for producing monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS | Humberto Campanella-Pineda, Rakesh Kumar | 2024-07-16 |
| 11988600 | Gas sensor MEMS structures and methods of fabrication thereof | Enrico Macrelli, Massimo Alioto, Chengkuo Lee, Costas J. Spanos | 2024-05-21 |
| 11979712 | Extension structures in piezoelectric microelectromechanical system microphones | Rakesh Kumar, Guofeng Chen | 2024-05-07 |
| 11890643 | Piezoelectric micromachined ultrasonic transducer and method of fabricating the same | Joan Josep Giner De Haro, Rakesh Kumar, Jia Jie Xia | 2024-02-06 |