Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112929 | Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus | Koji Suzuki, Katsuya Hara, Hideki Mataga | 2024-10-08 |
| 11923178 | Vacuum processing apparatus | Koji Suzuki, Yoshinori Fujii | 2024-03-05 |