Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112929 | Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus | Koji Suzuki, Hideto Nagashima, Katsuya Hara | 2024-10-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112929 | Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus | Koji Suzuki, Hideto Nagashima, Katsuya Hara | 2024-10-08 |