Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100610 | Electrostatic chuck and processing apparatus | Yuki Sasaki, Jun Shiraishi, Yutaka MOMIYAMA | 2024-09-24 |
| 12074014 | Electrostatic chuck and processing apparatus | Yuki Sasaki, Jun Shiraishi, Yutaka MOMIYAMA | 2024-08-27 |