Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100610 | Electrostatic chuck and processing apparatus | Yuki Sasaki, Yutaka MOMIYAMA, Reo Kawano | 2024-09-24 |
| 12074014 | Electrostatic chuck and processing apparatus | Yuki Sasaki, Yutaka MOMIYAMA, Reo Kawano | 2024-08-27 |
| 12014947 | Electrostatic chuck | Shuichiro Saigan, Tatsuya Mori, Masahiro Watanabe | 2024-06-18 |