Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080521 | Plasma processing method | Michiko Nakaya, Taku Gohira | 2024-09-03 |
| 11920242 | Temperature control method and plasma processing apparatus | Kaho Enomoto, Hayato Sakai | 2024-03-05 |