Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11920242 | Temperature control method and plasma processing apparatus | Yuya Minoura, Hayato Sakai | 2024-03-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11920242 | Temperature control method and plasma processing apparatus | Yuya Minoura, Hayato Sakai | 2024-03-05 |