Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131947 | Method for manufacturing semiconductor device and substrate processing apparatus | Satoshi Takagi, Akari Matsunaga, Keisuke Fujita | 2024-10-29 |
| 12027384 | Heat treatment apparatus and dummy substrate processing method | Yoshihiro TAKEZAWA | 2024-07-02 |