Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112947 | Method of crystallizing amorphous silicon film and deposition apparatus | Tatsuya MIYAHARA, Daisuke Suzuki, Yuki TANABE | 2024-10-08 |
| 12080552 | Method of depositing silicon film and film deposition apparatus | Tatsuya MIYAHARA, Daisuke Suzuki, Hiroyuki Hayashi | 2024-09-03 |
| 12027384 | Heat treatment apparatus and dummy substrate processing method | Yutaka Motoyama | 2024-07-02 |