Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887824 | Method of cleaning plasma processing apparatus and plasma processing apparatus | Nobuaki Shindo | 2024-01-30 |
| 11881410 | Substrate processing apparatus and plasma processing apparatus | Motoki Noro, Shu Kino | 2024-01-23 |