Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881410 | Substrate processing apparatus and plasma processing apparatus | Yasutaka HAMA, Motoki Noro | 2024-01-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881410 | Substrate processing apparatus and plasma processing apparatus | Yasutaka HAMA, Motoki Noro | 2024-01-23 |