Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12060640 | Film forming method and system | Jinseok Kim | 2024-08-13 |
| 11923177 | Plasma processing apparatus and plasma processing method | Keiji TABUKI, Kazumasa Igarashi, Kazuo Yabe | 2024-03-05 |