Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923177 | Plasma processing apparatus and plasma processing method | Keiji TABUKI, Yamato Tonegawa, Kazumasa Igarashi | 2024-03-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923177 | Plasma processing apparatus and plasma processing method | Keiji TABUKI, Yamato Tonegawa, Kazumasa Igarashi | 2024-03-05 |