Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165937 | Optical diagnostics of semiconductor process using hyperspectral imaging | Yan Chen | 2024-12-10 |
| 11961721 | Normal-incidence in-situ process monitor sensor | Ching-Ling Meng, Holger Tuitje, Qiang Zhao, Hanyou Chu | 2024-04-16 |