Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961721 | Normal-incidence in-situ process monitor sensor | Ching-Ling Meng, Holger Tuitje, Hanyou Chu, Xinkang Tian | 2024-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961721 | Normal-incidence in-situ process monitor sensor | Ching-Ling Meng, Holger Tuitje, Hanyou Chu, Xinkang Tian | 2024-04-16 |