Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142506 | Substrate transfer apparatus, substrate processing system and substrate processing method | Hiromitsu Sakaue | 2024-11-12 |
| 12009240 | Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate | Takehiro Shindo | 2024-06-11 |
| 11923222 | Substrate transfer device and substrate gripping determination method | — | 2024-03-05 |