Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183619 | Method of delivering substrate, and substrate delivery system | — | 2024-12-31 |
| 12094746 | Semiconductor manufacturing apparatus and method of controlling rotation of stage | Ryotaro Takahashi | 2024-09-17 |
| 12009240 | Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate | Toshiaki Kodama | 2024-06-11 |
| 11984340 | Teaching method | — | 2024-05-14 |
| 11961758 | Apparatus for processing substrate and method of transferring substrate | — | 2024-04-16 |
| 11948822 | Substrate transfer device and substrate processing system | Dongwei Li | 2024-04-02 |