TS

Tetsuji Sato

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
📍 Rifu, JP: #121 of 305 inventorsTop 40%
Overall (2024): #246,111 of 561,600Top 45%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11961718 Plasma processing method and plasma processing apparatus Shojiro Yahata 2024-04-16