SY

Shojiro Yahata

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #267,429 of 561,600Top 50%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11961718 Plasma processing method and plasma processing apparatus Tetsuji Sato 2024-04-16