Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074048 | Substrate processing apparatus and substrate processing method | Hiroki Harada, Tokutarou Hayashi, Tsuyoshi OTSUKA, Yuji Kawaguchi | 2024-08-27 |
| D1012311 | Holding pad for carrying substrate | Suguru Enokida, Kazuki Matsushita | 2024-01-23 |
| D1011550 | Holding pad for carrying substrate | Suguru Enokida, Kazuki Matsushita | 2024-01-16 |