Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074048 | Substrate processing apparatus and substrate processing method | Hiroki Harada, Tatsuhiko Tsujihashi, Tokutarou Hayashi, Yuji Kawaguchi | 2024-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074048 | Substrate processing apparatus and substrate processing method | Hiroki Harada, Tatsuhiko Tsujihashi, Tokutarou Hayashi, Yuji Kawaguchi | 2024-08-27 |