Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170209 | Substrate processing apparatus and substrate processing method | Takashi Yabuta, Hidetoshi Nakao, Masatoshi Kasahara | 2024-12-17 |
| 11908680 | Substrate processing method and substrate processing apparatus | Akira Fujita, Kyosei Goto, Hiroki Aso | 2024-02-20 |