Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170209 | Substrate processing apparatus and substrate processing method | Takashi Yabuta, Hidetoshi Nakao, Daisuke Saiki | 2024-12-17 |
| 11869777 | Substrate processing method and substrate processing apparatus | Fumihiro Kamimura, Teruomi Minami, Ikuo Sunaka | 2024-01-09 |