Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051599 | Cleaning method with in-line SPM processing | Brian J. Brown, Ekaterina A. Mikhaylichenko | 2024-07-30 |
| 12027382 | Surface cleaning with directed high pressure chemistry | Ekaterina A. Mikhaylichenko, Brian J. Brown | 2024-07-02 |
| 11942359 | Reduced semiconductor wafer bow and warpage | Abbas Ali, Christopher Scott Whitesell, Byron Joseph Palla | 2024-03-26 |