Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170218 | Method for cleaning electrostatic chuck | Chi-Hung Liao | 2024-12-17 |
| 12066756 | Method for lithography process | Chi-Hung Liao | 2024-08-20 |
| 12027407 | Substrate support apparatus and method | Chi-Hung Liao, Fei-Gwo Tsai | 2024-07-02 |
| 11914302 | Method and apparatus for controlling droplet in extreme ultraviolet light source | Chi-Hung Liao | 2024-02-27 |
| 11899377 | System and method for thermal management of reticle in semiconductor manufacturing | Chi-Hung Liao | 2024-02-13 |